Machinery / Semiconductors and Automation
Spin Dryers, Tape Mounters
Iwatani offers advanced one-stop solutions that encompass all processes encountered in the semiconductor manufacturing sector.
Spin Dryers
Design Concepts Are ‘High Speed’, ‘Low Vibration’, and ‘Low Dust Generation’. Spin Dryer with Automatic Balance Adjustment Function
This device dries water droplets and moisture on wafers via the centrifugal force generated by rotation and suctioned air flow. Balancing technology and airflow control that maximize workpiece drying efficiency makes it possible to safely dry even delicate workpieces.
Product Specifications
| Target Wafer | 4 to 8 inches | 12 inches | |
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| Number of Cradle | 2 or 4 pieces | 1 or 2 pieces | |
| Rotational Speed | Max 1,000 rpm | Max 700 rpm | |
| Power | AC 200 V, 3-Phase, 50/60 Hz, 30 A | ||
| Filter | ULPA or HEPA | ||
| Ionizer | Standard specifications | ||
| Speed Setting | 1 or 2 steps | ||
| Material | Rotor, cradle: SUS316L (electrolytic polishing) Exterior case: PVC |
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| Safety | In the event of abnormal vibrations and overloads Automatic stop |
Full Automated Balancing Function
The rotor runs vibration-free even in an unbalanced condition of 25 wafers on one side and zero on the other. This allows normal drying regardless of the number of wafers set.
Tape Mounters
Built-in Pre-cutting Mechanism Reduces Cost While Achieving High Precision Adhesion
Pre-cutting the roll tape inside the mounter reduces pre-cut processing costs to zero. The zero pre-cut interval dramatically increases the number of takes per roll and cuts taping costs by up to 40% (depending on the dimensions of the discarded section), compared to normal roll tape on a conventional mounter. We offer a broad range of machines including semi-automated and fully automated mounters.
Specifications
Semi-Automated Machine
| Target Workpiece | Up to 12 inches |
|---|---|
| Tape Used | Width 300 mm, roll external diameter up to 200 mm, roll internal diameter 76 to 77 mm |
| Application Speed | 30 sec/piece or less |
| Application Accuracy | ±1 mm |
| Device Dimensions |
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| Device Weight | 230 kg |
UV Irradiation Machines
This Device Irradiates and Cures Uv-Curable Tape and Film.
LED, high pressure mercury, and black light specifications are available for the fully automatic type, while black light specifications are available for the manual type, providing a lineup of UV irradiation devices to suit the development and production plans of customers. Two modes are available: an integrated irradiation mode, which irradiates an arbitrary amount of UV light, and an irradiation time mode, which irradiates UV for a specific time duration, enabling UV to be irradiated under set conditions.
Specifications
Fully Automated Machine
| Supported Sizes | 8 to 12 inches |
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| Dimensions |
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| Weight | Approx. 250 kg |
| Drive Air | 0.4 to 0.5 MPa 65 L/min |
| UV Irradiance | 9 mW/cm2 or more |
| N2 | 0.4 to 0.5 MPa 100 L/min |
| Power Supply | AC 100 V, 50/60 Hz, 30 A |
Please inquire for more information on spin dryers and tape mounters.
Electronics Equipmen Department
Tokyo
81-3-5405-5781
Osaka
81-6-7637-3072