Machinery / Semiconductors and Automation

Spin Dryers, Tape Mounters

Iwatani offers advanced one-stop solutions that encompass all processes encountered in the semiconductor manufacturing sector.

Spin Dryers

Spin Dryers

Design Concepts Are ‘High Speed’, ‘Low Vibration’, and ‘Low Dust Generation’. Spin Dryer with Automatic Balance Adjustment Function

This device dries water droplets and moisture on wafers via the centrifugal force generated by rotation and suctioned air flow. Balancing technology and airflow control that maximize workpiece drying efficiency makes it possible to safely dry even delicate workpieces.

Product Specifications

Target Wafer 4 to 8 inches 12 inches
Number of Cradle 2 or 4 pieces 1 or 2 pieces
Rotational Speed Max 1,000 rpm Max 700 rpm
Power AC 200 V, 3-Phase, 50/60 Hz, 30 A
Filter ULPA or HEPA
Ionizer Standard specifications
Speed Setting 1 or 2 steps
Material Rotor, cradle: SUS316L (electrolytic polishing)
Exterior case: PVC
Safety In the event of abnormal vibrations and overloads Automatic stop
スピンドライヤー説明

Full Automated Balancing Function

The rotor runs vibration-free even in an unbalanced condition of 25 wafers on one side and zero on the other. This allows normal drying regardless of the number of wafers set.

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Tape Mounters

Tape Mounters

Built-in Pre-cutting Mechanism Reduces Cost While Achieving High Precision Adhesion

Pre-cutting the roll tape inside the mounter reduces pre-cut processing costs to zero. The zero pre-cut interval dramatically increases the number of takes per roll and cuts taping costs by up to 40% (depending on the dimensions of the discarded section), compared to normal roll tape on a conventional mounter. We offer a broad range of machines including semi-automated and fully automated mounters.

Specifications

Semi-Automated Machine
Target Workpiece Up to 12 inches
Tape Used Width 300 mm, roll external diameter up to 200 mm, roll internal diameter 76 to 77 mm
Application Speed 30 sec/piece or less
Application Accuracy ±1 mm
Device Dimensions
Width
600 mm
Depth
800 mm
Height
1,170 mm
Device Weight 230 kg

UV Irradiation Machines

UV Irradiation Machines

This Device Irradiates and Cures Uv-Curable Tape and Film.

LED, high pressure mercury, and black light specifications are available for the fully automatic type, while black light specifications are available for the manual type, providing a lineup of UV irradiation devices to suit the development and production plans of customers. Two modes are available: an integrated irradiation mode, which irradiates an arbitrary amount of UV light, and an irradiation time mode, which irradiates UV for a specific time duration, enabling UV to be irradiated under set conditions.

Specifications

Fully Automated Machine
Supported Sizes 8 to 12 inches
Dimensions
Width
770 mm
Depth
1,090 mm
Height
1,200 mm
Weight Approx. 250 kg
Drive Air 0.4 to 0.5 MPa 65 L/min
UV Irradiance 9 mW/cm2 or more
N2 0.4 to 0.5 MPa 100 L/min
Power Supply AC 100 V, 50/60 Hz, 30 A

Please inquire for more information on spin dryers and tape mounters.

Electronics Equipmen Department

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